Material Safety Data Sheet for Ozone

Posted by Ozone Solutions on 18th Oct 2021

Ozone MSDS

Product Identification

Product Name: Ozone

Common Names/Synonyms: Triatomic Oxygen, Trioxygen, O3

Ozone Generator Manufacturer/Supplier: Ozone Solutions Inc.
451 Black Forest Road / Hull, Iowa 51239
P: 712-439-6880

Product Use: This SDS is limited to ozone produced in gaseous form on site by an ozone generator, in varying concentrations in either air or aqueous solution, for the purposes of odor abatement, oxidation of organic compounds or antimicrobial intervention, in a variety of applications, from food processing to ground water remediation.

Hazard Identification

Oxidizing Gas Skin Irritation - Category 3 Acute Aquatic Toxicity - Category 1
  Eye Irritation - Category 2B  
  Respiratory Systemic Toxicity - Category 1 (Acute & Repeated Exposures)  

NOTE: Severe respiratory toxicity will develop before skin or eye irritation go beyond listed categories.  Anyone with chronic pulmonary problems, especially asthma, should avoid exposure to ozone.

  WHMIS Classifications (Workplace Hazardous Materials Information System, Canada)    
D1A Acute Lethality - Very toxic, immediately C Oxidizing
D2A Chronic Toxicity - Very Toxic F Dangerously Reactive
D2B Mutagenicity - Toxic    


  • Chemical Name: Ozone
  • Common Names: Triatomic oxygen, trioxygen
  • Chemical Formula: O3
  • CAS Registry Number: 10028-15-6

First Aid Measures

Skin Contact YES Irritation Rinse with water
Skin Absorption NO NA NA
Eye Contact YES Irritation Rinse with water, remove contacts
Ingestion NO NA NA
Inhalation YES Headache, cough, dry throat, heavy chest, shortness of breath Remove to fresh air, provide oxygen therapy as needed

Fire Fighting Measures

While ozone itself is not flammable, it is a strong oxidant and may accelerate, even initiate, combustion or cause explosions. Use whatever extinguishing agents are indicated for burning materials.

Accidental Release Measures

Turn off ozone generator and ventilate the area. Evacuate the area until ozone levels subside.

Handling and Storage

Ozone must be contained within ozone-resistant tubing and pipes from the generation point to the application point. Any leaks must be repaired before further use.

Exposure Controls/Personal Protection

OSHA Permissible Exposure Limit: 8 hour Time Weighted Average 0.1 ppm 
ANSI/ASTM: 8 hour TWA 0.1 ppm, Short Term Exposure Limit 0.3 ppm 
ACGIH: 8 hour TWA 0.1 ppm; STEL 0.3 ppm 
NIOSH: Exposure Limit Ceiling Value 0.1 ppm light; 0.08 ppm moderate; 0.05 ppm, heavy; Light, moderate, heavy work TWA <= 2 hours, 0.2 ppm Immediately Dangerous to Life or Health 5 ppm 
Respiratory Protection: Use full face self-contained breathing apparatus for entering areas with high concentration of ozone. 
Engineering controls: use ozone destruct units (thermal and/or catalytic) for off gassing ozone.

Physical and Chemical Properties


Physical State




Molecular Weight


Flash Point



Clear at low concentrations, blue at higher concentrations

Evaporation rate



Distinctive pungent odor



Odor threshold

0.02 to 0.05 ppm; exposure desensitizes

Explosive limits


Melting Point


Relative density


Boiling Point


Partition coefficient


Vapor pressure

> 1 atm

Auto-ignition temperature


Vapor density

1.6 (air=1)

Decomposition temperature


Solubility in water

570mg/L @ 20°C, 100% O3, 0.64 @ 0°C (vol/vol)



Stability and Reactivity

Ozone is highly unstable and highly reactive. Avoid contact with oxidizable substances, including alkenes, benzene and other aromatic compounds, rubber, dicyanogen, bromine diethyl ether, dintrogen tetroxide, nitrogen trichloride, hydrogen bromide, and tetraluorohydrazine. Ozone will readily react and spontaneously decompose under normal ambient temperatures.

Toxicological Information

Likely routes of exposure: inhalation, eyes, skin exposure.

Effects of Acute Exposure: Discomfort, including headache, coughing,
dry throat, shortness of breath, heavy feeling in chest (including 
possible pulmonary edema/fluid in the lungs); higher levels of exposure 
intensify symptoms. Irritation of skin and/or eyes is also possible.

Effects of Chronic Exposure: Similar to acute exposure effects, with
possible development of chronic breathing disorders, including asthma.

Inhalation LC50: mice, 12.6 ppm for 3 hours; hamsters, 35.5 ppm for 3 hours

Irritancy of Ozone YES
Sensitization to Ozone NO
Carcinogenicity (NTP,IARC,OSHA) NO
Reproductive Toxicity Not Proven
Teratogenicity Not Proven
Mutagenicity Not Proven
Toxicologically Synergistic Products Increase susceptibility to allergens, pathogens, irritants

Ecological Information

The immediate surrounding area may be adversely affected by an ozone release, particularly plant life. Discharge of ozone in water solution would also be harmful to any aquatic life. Due to natural decomposition, bioaccumulation will not occur, and the area affected would be limited.

Disposal Considerations

Off-gassing of ozone should be through an ozone destruct unit which uses heat and/or a catalyst to accomplish the breakdown of ozone to oxygen before release into the atmosphere.

Transport Information

NOT APPLICABLE, as ozone is unstable and either reacts with other substances in the environment or decomposes, and therefore must be generated at the location and time of use.

Regulatory Information

SARA = Superfund Amendments and Renewal Act 
SARA Title III Section 302 Extremely Hazardous Substance TPQ: 100 lbs. 
SARA Title III Section 304, EHS RQ: 100 lbs. 
SARA Title III Section 313: Ozone is reportable if more than 10,000 lbs. are used/year. 
TPQ (Threshold Planning Quantity) requires emergency planning activities if this amount is on site at any time during year 
RQ (Reportable Quantity) requires any release of this amount into the environment to be reported to the National Response Center Source: EPA List of Lists

Other Information

The half-life of ozone is much shorter in water than in air. Increased temperature in either solvent decreases the half-life. Published research indicates a half-life of 20 minutes for ozone dissolved in water at 20°C, and a half-life of approximately 25 hours for ozone in dry air at 24°C (McClurkin & Maier, 2010). The practical half-life time is actually less, especially in air, due to air circulation, humidity, the presence of contaminants or walls with which to react, etc. In many situations, with air movement, warmer temperatures, and normal relative humidity, the half-life of ozone in air could be 1 hour or less. Further, ventilation of a closed space to other areas will also disperse the ozone, so that concentration levels can rapidly decrease after generation ceases.

Source websites: Canadian Centre for Occupational Health and Safety: Chemical Profiles: Ozone Haz-Map: Occupational Exposure to Hazardous Agents: Ozone International Chemical Safety Cards #0068: Ozone NIOSH Pocket Guide to Chemical Hazards: Ozone United States National Library of Medicine ChemIDplus Lite: Ozone 10028-15-6

Disclaimer: Ozone Solutions provides this information in good faith, but makes no claim as to its comprehensiveness or accuracy. It is intended solely as a guide for the safe handling of the product by properly trained personnel, and makes no representations or Warranties, express or implied, of the merchantability or fitness of the product for any purpose, and Ozone Solutions will not be responsible for any damages resulting from the use of, or reliance upon, this information.

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